Development of wide area reaction system for Reel-to-Reel TFA-MOD process

Physica C: Superconductivity and its Applications

Volumn 445-448, Issue 1-2, 2006, Pages 549-552

  Nomoto, Sukeharu ^a   Aoki, Yuji ^a   Teranishi, Ryo ^a   Sato, Akihiro ^b   Izumi, Teruo ^a   Shiohara, Yuh ^a  

^a SUPERCONDUCTIVITY RESEARCH LABORATORY   (Japan)

^b CRC Solutions Corp   (Japan)

Author keywords

Metal organic deposition; Numerical simulation; Reaction tube; Vertical flow mode

Indexed keywords

COATINGS; COMPUTER SIMULATION; DIFFUSION COATINGS; ELECTRIC CONDUCTORS; GROWTH KINETICS; NUMERICAL ANALYSIS;

GAS FLOW MODE; METAL ORGANIC DEPOSITION; REACTION TUBE; VERTICAL FLOW MODE;

YTTRIUM BARIUM COPPER OXIDES;

EID: 33748160140     PISSN: 09214534     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physc.2006.04.103     Document Type: Article

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