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Volumn 426-431, Issue II, 2005, Pages 966-972
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Numerical simulation of TFA-MOD process
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Author keywords
Convective multi element diffusion equations; Metal organic deposition; Numerical model; Polycrystalline film growth
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Indexed keywords
COMPUTER SIMULATION;
CRYSTAL GROWTH;
FLOW OF FLUIDS;
MATHEMATICAL MODELS;
YTTRIUM BARIUM COPPER OXIDES;
CONVECTIVE MULTI-ELEMENT DIFFUSION EQUATIONS;
METAL ORGANIC DEPOSITION;
NUMERICAL MODELS;
POLYCRYSTALLINE FILM GROWTH;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
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EID: 25644460398
PISSN: 09214534
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physc.2005.01.084 Document Type: Article |
Times cited : (9)
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References (6)
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