A correlation for predicting film-pulling velocity in immersion lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6281, Issue , 2006, Pages

  Schuetter, Scott ^a   Shedd, Timothy ^a   Doxtator, Keith ^a   Nellis, Gregory ^a   Van Peski, Chris ^b  

^a UNIVERSITY OF WISCONSIN   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT ANGLE; OPTICAL CORRELATION; OPTICAL SYSTEMS; REFRACTIVE INDEX; VELOCITY MEASUREMENT;

IMMERSION LITHOGRAPHY; IMMERSION SYSTEMS; LIQUID DEPOSITION;

PHOTOLITHOGRAPHY;

EID: 33748064364     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.632706     Document Type: Conference Paper

References (9)

1. M. Switkes and M. Rothschild, Proc. SPIE 4691, 459 (2002).
2. M. Rothschild, T.M. Bloomstein, R. R. Kunz, V. Liberman, M. Switkes, S.T. Palmacci, J.H.C. Sedlacek, D.E. Hardy, and A.J. Grenville, "Liquid Immersion Lithography. Why, How, and When?" J. Vac. Sci. Technol. B 22(6), 2877-2881 (2004).
3. J.G. Petrov, R.V. Sedev, and P.O. Petrov, "Effect of Geometry on Steady Wetting Kinetics and Critical Velocity of Film Entrainment," Adv. Colloid Interface Sci. 38, 229-269 (1992).
4. M. Schneemilch, R.A. Hayes, J.G. Petrov, and J. Ralston, "Dynamic Wetting and Dewetting of a Low-Energy Surface by Pure Liquids," Langmuir 14(24), 7047-7051 (1998).
5. T.D. Blake, and J.M. Haynes, "Kinetics of Liquid/Liquid Displacement," J. Colloid Interface Sci. 30, 421-423 (1969).
6. P.O. Petrov and J.G. Petrov, "A Combined Molecular-Hydrodynamic Approach to Wetting Kinetics," Langmuir 8(7), 1762-1767 (1992).
7. R.C. Gonzalez, R.E. Woods and S.L. Eddins, Digital Image Processing using MATLAB, Pearson Prentice Hall, Upper Saddle River, NJ (2004).
8. S. Schuetter, T. Shedd, K. Doxtator, G. Nellis, C. Van Peski, A. Grenville, S.H. Lin, and D.C. Owe-Yang, "Measurements of the Dynamic Contact Angle for Conditions Relevant to Immersion Lithography," submitted to the Journal of Microlithography, Microfabrication, and Microsystems.
9. P.O. de Gennes, F. Brochard-Wyart, and D. Quere, Capillarity and Wetting Phenomena: Drops, Bubbles, Pearls, Waves, Springer, NY, (2004).