Formation, evolution, and degradation of nanostructured covalent thin films deposited by low-energy cluster beam deposition

Journal of Materials Research

Volumn 21, Issue 7, 2006, Pages 1638-1644

  D'Urso, Luisa ^a   Scalisi, A Alessandro ^a   Altamore, Corinna ^a   Compagnini, Giuseppe ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; ELECTRONIC PROPERTIES; IN SITU PROCESSING; LASER APPLICATIONS; MAGNETIC PROPERTIES; OPTICAL PROPERTIES; POROUS MATERIALS; SILICON;

CARBON CLUSTER BEAMS; LOW-ENERGY CLUSTER BEAM DEPOSITION (LECBD); REACTIVE GASES;

THIN FILMS;

EID: 33747509240     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0216     Document Type: Article

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