Application of the LIGA process for fabrication of gas avalanche devices

IEEE Transactions on Nuclear Science

Volumn 47, Issue 3 PART 2, 2000, Pages 923-927

  Hi, K Kim ^a   Jackson, K ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33747256272     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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2. F. Bartol, M. Bordessoule, G. Chaplier, M. Lemonnier and S. Megtert, "The C. A. T. pixel proportional gas counter detector," J. Phys. Ill France, vol. 6, pp. 337-347, 1996.
3. F. Sauli, "GEM: A new concept for electron amplification in gas detectors," Nucl. Instr. Meth. , A 386, pp. 531-534, 1997.
4. H. S. Cho, J. Kadyk, S. H. Han, W. S, Hong, V. Perez-Mendez, W. Wenzel, K. Pitts, M. D. Martin and J. B. Hutchins," GEM: Performance and aging tests, IEEE Trans. Nucl. Sei. , vol. 46, no. 3, pp. 306-311, 1999.
5. S. Beirle, U. Werthenbach, G, Zech and T. Zeuner, "Carbon coated gas electron multiplier," Nucl. Instr. Meth. , A 423, pp. 297-302, 1999.
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7. H. S. Cho, I. J. Park, W. S. Hong, V. Perez-Mendez and J. Kadyk, "Utilization of a thin columnar cesium iodide (Csl) layer in gas avalanche microdetector," Nucl. Instr. Meth. , A 422, pp. 269-272, 1999.
8. See also a separate paper presented by I. J. Park et al. in this conference: IJ. Park, J. G. Kim, H. K. Kirn, W. S. Hong, S. H. Han, V. Perez-Mendez, J. Kadyk, W. Wenzel and K,S. Joo, "Columnar cesium iodide (Csl) and LIGA micro-hole arrays for use in gas avalanche detectors," IEEE Nucl. Sei. Symposium, Seattle, Oct. 26-30, 1999.
9. CXRL toolset, University of Wisconsin.
10. S. Bachmann, A. Bressan, L. Ropelewski, F. Sauli, A. Sharma, and D. Mormann, "Charge amplification and transfer processes in the gas electron multiplier" CERN-EP/99-48, December, 1999.
11. Maxwell Electric Field Simulator, Ansoft Corporation, Pittsburgh, PA 15219, USA.
12. Garfield, Version 6. 31, CERN.
13. Goodfellow, Cambridge Science Park, Cambridge CB4 4DJ, England.