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Volumn 44, Issue 1, 2006, Pages 30-39

Electrode microwave discharge and plasma self-organization

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EID: 33747193621     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/44/1/004     Document Type: Article
Times cited : (26)

References (37)
  • 15
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    • Lebedev YuA 1998 Proc. Russian Conf. on Physics of Low Temperature Plasma (Petrozavodsk) p 254
    • (1998) , pp. 254
    • Lebedev, Yu.A.1
  • 21
    • 33747171991 scopus 로고    scopus 로고
    • Lebedev Yu A, Mokeev M V, Tatarinov A V 2000 Proc. Int. Workshop Strong Microwaves in Plasmas Institute of Applied Physics RAS vol 1 (N-Novgorod) p 271
    • (2000) , vol.1 , pp. 271
    • Lebedev, Yu.A.1    Mokeev, M.V.2    Tatarinov, A.V.3
  • 22
  • 26
    • 33747156924 scopus 로고    scopus 로고
    • Lebedev Yu A, Mokeev M V, Tatarinov A V 2003 Proc. IV Int. Workshop Microwave Discharges: Fundamentals and Application INP (Greifswald, Germany) p 55
    • (2003) , pp. 55
    • Lebedev, Yu.A.1    Mokeev, M.V.2    Tatarinov, A.V.3
  • 35
    • 33747187256 scopus 로고    scopus 로고
    • Bardos L, Barankova H, Lebedev Yu A 1999 42nd Ann. Conf. of Soc. of Vac. Coaters, Chicago, IL, April 17-22 Proc. SVC TC p E-7
    • (1999) , pp. 7
    • Bardos, L.1    Barankova, H.2    Lebedev, Yu.A.3
  • 36
    • 33747185093 scopus 로고    scopus 로고
    • Nagasaka M, Kando M 2000 Proc. 17th Symp on Plasma Processing (Japan) p 579
    • (2000) , pp. 579
    • Nagasaka, M.1    Kando, M.2
  • 37
    • 33747180544 scopus 로고    scopus 로고
    • Eto A, Kimura S, Kando M 2003 Proc.5 Int. Workshop Microwave Discharges: Fundamentals and Application (Grefswald) p 15
    • (2003) , pp. 15
    • Eto, A.1    Kimura, S.2    Kando, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.