Reaction products and oxide thickness formed by Ti out-diffusion and oxidization in poly-Pt/Ti/SiO 2 /Si with oxide films deposited

Applied Surface Science

Volumn 252, Issue 20, 2006, Pages 7590-7593

  Chen, Changhong ^a,c   Huang, Dexiu ^a,c   Zhu, Weiguang ^b   Feng, Yi ^c   Wu, Xigang ^c  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Diffusion; Interface and surface; Oxidization; Titanium

Indexed keywords

DEPOSITION; DIFFUSION; HEAT TREATMENT; INTERFACES (MATERIALS); METALLIC FILMS; OXIDATION; PEROVSKITE;

INTERFACIAL INTERACTIONS; OXIDE FILMS; REACTION PRODUCTS;

TITANIUM;

EID: 33747174279     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.12.111     Document Type: Article

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