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Volumn 80, Issue 9, 2006, Pages 986-989
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CO2 and H2 detection with a CHx/porous silicon-based sensor
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Author keywords
Carbon dioxide; Gas sensor; Hydrogen; Porous silicon
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Indexed keywords
CHEMICAL SENSORS;
ELECTRIC POTENTIAL;
HYDROCARBONS;
HYDROGEN;
PLASMAS;
POROUS SILICON;
PROPANE;
GAS SENSING DEVICE;
HYDROCARBON GROUPS;
PROPANE GASES;
ROOM TEMPERATURE;
CARBON DIOXIDE;
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EID: 33747051238
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2006.01.004 Document Type: Article |
Times cited : (30)
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References (13)
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