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Volumn 80, Issue 9, 2006, Pages 986-989

CO2 and H2 detection with a CHx/porous silicon-based sensor

Author keywords

Carbon dioxide; Gas sensor; Hydrogen; Porous silicon

Indexed keywords

CHEMICAL SENSORS; ELECTRIC POTENTIAL; HYDROCARBONS; HYDROGEN; PLASMAS; POROUS SILICON; PROPANE;

EID: 33747051238     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.01.004     Document Type: Article
Times cited : (30)

References (13)
  • 2
    • 33747071234 scopus 로고    scopus 로고
    • He G, Narushima T, Iguchi Y, Goto T, Hirai T. 11th International conference on solid state ionics, Waikiki Beach, Honolulu, Hawaii, USA, 1997.
  • 8
    • 33747050420 scopus 로고    scopus 로고
    • Ouchabane M, Tadjine R, Lahmar H, Zekara M, Henda K, Kessi O. Deposition of hard carbon films in triode RF (13.56 MHz) multipolar reactor from a methane plasma. In: Proceeeding of the 14th international symposium on plasma chemistry, Prague, Czech Republic, 1999. p. 1709.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.