BaxSr1-xTiO3 thin films deposited by RF hollow cathode plasma jet technique

Ferroelectrics

Volumn 317, Issue , 2005, Pages 1-6

  Hubicka Z ^a   Olejnicek J ^a   Cada M ^a   Virostko, P ^a   Sichova H ^a,b   Deyneka, A ^a   Jastrabik L ^a   Chvostova D ^a   Sicha M ^a,b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Ellipsometry; Emission spectroscopy; Ferroelectric thin films; Hollow cathode sputtering

Indexed keywords

BARIUM COMPOUNDS; ELLIPSOMETRY; EMISSION SPECTROSCOPY; FERROELECTRIC MATERIALS; PLASMA THEORY; X RAY DIFFRACTION ANALYSIS;

HOLLOW CATHODE SPUTTERING; OPTICAL BAND GAP; PLASMA JET TECHNIQUE;

THIN FILMS;

EID: 33746884566     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190590963327     Document Type: Article

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