Fabrication and characterization of Pb-rich lead strontium titanate films by RF magnetron sputtering

Ferroelectrics

Volumn 335, Issue , 2006, Pages 119-125

  Fujii, T ^a   Tanaka, T ^a   Ishikawa, M ^a   Adachi, M ^a  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

Dielectric property; Lead strontium titanate; RF magnetron sputtering

Indexed keywords

DIELECTRIC LOSSES; ELECTRODES; GRAIN SIZE AND SHAPE; LEAD; MAGNETRON SPUTTERING; SILICON; STRONTIUM COMPOUNDS;

LEAD STRONTIUM TITANATE; LEAD STRONTIUM TITANATE (PST) FILMS; RF MAGNETRON SPUTTERING;

FERROELECTRIC THIN FILMS;

EID: 33746839286     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190600689662     Document Type: Conference Paper

References (7)

1. S. Nomura and S. Sawada, Dielectric properties of lead-strontium titanate. J. Phys. Soc. Jpn. 10, 108-111 (1955).
2. 3 ceramics on dielectric and physical properties. Int. J. Inorg. Mater. 3, 709-714 (2001).
3. 3 ceramics. J. Mater. Sci. 12, 17-20 (2001).
4. 3 thin films. Ferroelectr. 271, 303-308 (2002).
5. 3thin films prepared by RF magnetron sputtering. Jpn. J. Appl. Phys. 41, 6761-6764 (2002).
6. T. Fujii, J. Du, T. Karaki, and M. Adachi, Ferroelectric properties of lead strontium titanate thin films by RF magnetron sputtering. J. Kor. Phys. Soc. 42, Supp. Issue 4, S1178-S1181 (2003).
7. 3 films by sol-gel technique. Jpn. J. Appl. Phys. 44, 692-694 (2005).