Electrical properties of epitaxial (Pb,Sr)TiO3 thin films prepared by RF magnetron sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 6761-6764

  Karaki, Tomoaki ^a   Du, Jing ^a   Fujii, Tadashi ^a   Adachi, Masatoshi ^a  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

(Pb,Sr)TiO3 thin films; Dielectric property; Epitaxy; RF magnetron sputtering; Tunability

Indexed keywords

ELECTRIC PROPERTIES; EPITAXIAL GROWTH; POLYCRYSTALLINE MATERIALS; SPUTTERING;

DIELECTRIC PROPERTY; RF MAGNETRON SPUTTERING; TUNABILITY;

THIN FILMS;

EID: 20444502804     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.6761     Document Type: Article

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