Deep Lithography with Protons to prototype pluggable micro-optical out-of-plane coupling structures for multimode waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5956, Issue , 2005, Pages 1-12

  Van Erps, Jürgen ^a   Van Steenberge, Geert ^b   Hendrickx, Nina ^b   Geerinck, Peter ^b   Volckaerts, Bart ^a   Debaes, Christof ^a   Van Daele, Peter ^b   Thienpont, Hugo ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

Deep lithography with protons (DLP); Laser ablation; Light coupling structures; Optical interconnect; Polymers; Printed circuit board (PCB); Waveguides

Indexed keywords

LASER ABLATION; OPTICAL FIBER COUPLING; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; POLYMERS; PRINTED CIRCUIT BOARDS; PROTONS;

DEEP LITHOGRAPHY WITH PROTONS (DLP); LIGHT COUPLING STRUCTURES; MULTIMODE WAVEGUIDES;

MICROOPTICS;

EID: 32344444644     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.623143     Document Type: Conference Paper

References (9)

1. R. T. Chen et al., "Fully embedded board-level guided-wave optoelectronic interconnects", Proceedings of the IEEE, 88 (6), 2000.
2. R. Yoshimura et al., "Polymeric Optical Waveguide Films with 45° Mirrors Formed with a 90° V-Shaped Diamond Blade, Electronics Letters, 33 (15), pp. 1311-1312, July 1997.
3. Y. Liu et al., "Optoelectronic Integration of Polymer Waveguide Array and Metal-Semiconductor-Metal Photodetector Through Micromirror Couplers, IEEE Photonics Technology Letters, 13 (4), pp.355-357, April 2001.
4. M. Kagami et al., "A Polymer Optical Waveguide with Out-of-Plane Branching Mirrors for Surface-Normal Optical Interconnections", Journal of Lightwave Technology, 19 (12), pp. 1949-1955, December 2001.
5. G. Van Steenberge et al., "MT-Compatible Laser-Ablated Interconnections for Optical Printed Circuit Boards", Journal of Lightwave Technology, 22 (9), pp. 2083-2090, 2004.
6. M. Born and E. Wolf, Principles of optics, Chapter 1, Cambridge University Press, Cambridge, 1999.
7. E.D. Palik, Handbook of optical constants of solids, p. 294, Academic Press, London, 1985.
8. B. Volckaerts et al., "Deep Lithography with Protons: a generic fabrication technology for refractive micro-optical components and modules", Asian J. of Physics, 10 (2), pp. 195-214, 2001.
9. P. Tuteleers et al., "Replication of refractive micro opto-mechanical components made with Deep Lithography with Protons", Proceedings of the SPIE, vol. 4408, pp. 329-337, 2001.