Tuning of MEMS devices using evolutionary computation and open-loop frequency response

IEEE Aerospace Conference Proceedings

Volumn 2005, Issue , 2005, Pages

  Keymeulen, Didier ^a   Fink, Wolfgang ^a   Ferguson, Michael I ^a   Peay, Chris ^a   Oks, Boris ^a   Terrile, Richard ^a   Yee, Karl ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS GYROSCOPES; OPEN LOOP FREQUENCY RESPONSE;

EVOLUTIONARY ALGORITHMS; FREQUENCY RESPONSE; GYROSCOPES; RESONATORS; TUNING;

MICROELECTROMECHANICAL DEVICES;

EID: 33746236473     PISSN: 1095323X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AERO.2005.1559562     Document Type: Conference Paper

References (12)

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