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Contributions to Plasma Physics

Volumn 46, Issue 5-6, 2006, Pages 439-444

Probe diagnostics of microwave plasma at frequency 2.45 GHz in CW and pulse regime

(5) Stranak V a,b Adamek P b Blazek J b Tichy M a Spatenka P c

a CHARLES UNIVERSITY (Czech Republic)

b UNIVERSITY OF SOUTH BOHEMIA (Czech Republic)

c TECHNICAL UNIVERSITY OF LIBEREC (Czech Republic)

Author keywords

Diagnostics of pulsed discharge; Double Langmuir probe; Electron temperature; Microwave plasma 2.45 GHz; Surfatron

Indexed keywords

ANGLE MEASUREMENT; ELECTRIC DISCHARGES; ELECTRON TEMPERATURE; LANGMUIR PROBES; PARAMETER ESTIMATION; PLASMA DEVICES; PLASMA SOURCES;

CONTACT-ANGLE MEASUREMENTS; DIAGNOSTIC OF PULSED DISCHARGE; DOUBLE LANGMUIR PROBE; MICROWAVE PLASMA; MICROWAVE PLASMA 2.45 GHZ; PLASMA PARAMETER; PROBE MEASUREMENTS; PULSE REGIMES; PULSED DISCHARGE; SURFATRA;

CONTACT ANGLE;

EID: 33746190714 PISSN: 08631042 EISSN: 15213986 Source Type: Journal
DOI: 10.1002/ctpp.200610028 Document Type: Conference Paper

Times cited : (3)

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