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Volumn 54, Issue SUPPL. 3, 2004, Pages
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Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy
a,c a,c a,c a,d b b b |
Author keywords
Microwave plasma; Optical emission spectroscopy; Probe diagnostics; Surfatron
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Indexed keywords
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EID: 33746235356
PISSN: 00114626
EISSN: 15729486
Source Type: Journal
DOI: 10.1007/BF03166516 Document Type: Article |
Times cited : (5)
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References (11)
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