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Volumn 16, Issue 29, 2006, Pages 2969-2971
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Silicon onion-layer periodic three dimensional nanostructures
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL ORIENTATION;
INFILTRATION;
MICROELECTRONICS;
MICROSTRUCTURE;
NANOSTRUCTURED MATERIALS;
PHOTOSENSITIVITY;
POLYMERS;
RESINS;
AIR CAVITIES;
MACROPOROUS SILICON;
PHOTOSENSITIVE RESINS;
THREE DIMENSIONAL NANOSTRUCTURES;
SILICON COMPOUNDS;
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EID: 33746153381
PISSN: 09599428
EISSN: 13645501
Source Type: Journal
DOI: 10.1039/b604037c Document Type: Review |
Times cited : (6)
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References (16)
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