Simple interferometric fringe stabilization by charge-coupled-device-based feedback control

Applied Optics

Volumn 45, Issue 19, 2006, Pages 4563-4566

  Young, Preston P ^a   Priambodo, Purnomo S ^a   Maldonado, Theresa A ^b   Magnusson, Robert ^c  

^a The University of Texas at Arlington   (United States)

^b Texas AandM University   (United States)

^c UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; FEEDBACK CONTROL; LITHOGRAPHY; SPECKLE;

CCD ELEMENT; CONTROL SIGNAL; FRINGE STABILIZATION; ULTRAVIOLET INTERFERENCE LITHOGRAPHY;

INTERFEROMETRY;

EID: 33746105770     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.004563     Document Type: Article

References (7)

1. C. C. Guest and T. K. Gaylord, "Phase stabilization for holographic optical data processing," Appl. Opt. 24, 2140-2144 (1985).
2. P. Hariharan, B. F. Oreb, and N. Brown, "Real-time holographic interferometry: a microcomputer system for the measurement of vector displacements," Appl. Opt. 22, 876-880 (1983).
3. G. Saxby, "Fringe stabilization," in The Manual of Practical Holography (Focal Press, 1991), pp. 423-432.
4. J. Odhner, Stabilock II Active Fringe Stabilizer (Stabilock Application Notes, 1993).
5. C. Lima and L. H. Cescato, "Miring of the reflected waves to monitor and stabilize holographic exposures," Opt. Eng. 35, 2804-2809 (1996).
6. R. K. Heilmann, P. T. Konkola, C. G. Chen, G. S. Pati, and M. L. Schattenburg, "Digital heterodyne interference fringe control system," J. Vac. Sci. Technol. B 19, 2342-2346 (2001).
7. F. Hrebabetzky, A. Albertazzi, Jr., and C. L. Veiga, "Camera-based active phase stabilization for electronic holography," in Laser Metrology for Precision Measurement and Inspection in Industry, A. Albertazzi, Jr., ed., Proc. SPIE 4420, 155-161 (2001).