Numerical modeling for topographical evolution of a 3D micro-electronic device structure

Journal of the Korean Physical Society

Volumn 48, Issue 6, 2006, Pages 1606-1610

  Lee, Jun Gu ^a   Won, Taeyoung ^a  

^a Inha University   (South Korea)

Author keywords

Cell advancing method; Deposition; Etching; Mesh generation; Topography simulation

Indexed keywords

EID: 33746102163     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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