Mechanical properties of sol-gel inorganic-organic hybrid films in nanoindentation

Key Engineering Materials

Volumn 317-318, Issue , 2006, Pages 317-322

  Zhang, J Q ^a   Matsuda, A ^a   Muto, H ^a   Sakai, M ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Elastic modulus; Mechanical properties; Meyer hardness; MTES; Nanoindentation

Indexed keywords

ELASTIC MODULI; HARDNESS; HEAT TREATMENT; INDENTATION; MECHANICAL PROPERTIES; SOL-GELS;

METHYLSILSEQUIOXANE FILM; MEYER HARDNESS; MTES; NANOINDENTATION;

THIN FILMS;

EID: 33746095362     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.317-318.317     Document Type: Conference Paper

References (12)

1. A. Maia Seco, M. Clara Goncalves and Rui M. Almeida: Mater. Sci. Eng. B 76 (2000), p. 193.
2. W. Que and X. Hu: Opt. Mater. 22 (2003), p. 31.
3. A. Matsuda, Y. Matsuno, M. Tatsumisago and T. Minami: J. Am. Ceram. 81 (1998), p. 2849.
4. A. J. Atanacio, B. A. Latella, C. J. Barbé and M. V. Swain: Surface and Coatings Tech. in press.
5. M. Schulze and W. D. Nix: Int. J. Solids Struct. 37 (2000), p. 1045
6. J. Malzbender, G. de With and J. M. J. den Toonder: Thin Solid Films 372 (2000), p. 134.
7. M. Sakai and Y. Nakano: J. Mater. Res. 17 (2002), p. 2161.
8. J. Zhang and M. Sakai: Mater. Sci. Eng. A 381 (2004), p. 62.
9. M. Sakai: Acta Metall. Mater. 41 (1993), p. 1751.
10. M. Sakai: J. Mater. Res. 14 (1999), p. 3630.
11. K. L. Johnson: Contact Mechanics, Chap. 4, Cambridge Uni. Press, Cambridge, 1985.
12. N. B. Colthup, L. H. Daly and S. E. Wiberley: Introduction to Infrared and Raman Spectroscopy, Academic Press, New York, 1964.