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Volumn 264, Issue 1, 2006, Pages 187-192
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Laser beam homogenization: Modeling and comparison with experimental results
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Author keywords
Beam shaping; Excimer laser; Homogenizer; Optical system design
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Indexed keywords
LASER APPLICATIONS;
NUMERICAL ANALYSIS;
OPTICAL MATERIALS;
OPTICAL PROPERTIES;
OPTICAL SYSTEMS;
BEAM SHAPING;
HOMOGENIZERS;
OPTICAL SYSTEM DESIGN;
LASER BEAM EFFECTS;
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EID: 33746000685
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/j.optcom.2006.02.022 Document Type: Article |
Times cited : (9)
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References (8)
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