Hercules, an XeCl excimer laser facility for high-intensity irradiation experiments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3423, Issue , 1998, Pages 35-43

  Di Lazzaro, P ^a  

^a ENEA   (Italy)

Author keywords

Discharge homogeneity; Excimer laser; Laser ablation; Laser beam divergence; Laser resonator; Phototriggered discharge; Shock hardening; Surface annealing; X ray plasma; X ray preionisation

Indexed keywords

AMORPHOUS SILICON; CHLORINE COMPOUNDS; ELECTRIC DISCHARGES; EXCIMER LASERS; HARDENING; IRRADIATION; LASER ABLATION; LASER BEAMS; LASER RESONATORS; RADIATION EFFECTS; TEXTILE INDUSTRY; X RAYS;

BEAM DIVERGENCE; HIGH-INTENSITY IRRADIATIONS; IRRADIATION EXPERIMENTS; LASER FACILITIES; OPTICAL CHARACTERISTICS; REPETITION RATE; VERY HIGH ENERGIES; XECL EXCIMER LASER;

LASER APPLICATIONS;

EID: 0005424084     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.316586     Document Type: Conference Paper

References (51)

1. C. Brau: "Rare gas halogen excimers", Excimer Lasers, C. Rhodes Ed. (2nd edition, Springer Verlag, Berlin, 1984);
2. see also M. Gaillard: "Progress in laser techniques: toward industrial UV lasers for the nineties", Laser Science and Technology vol. 35, N. Chester, V. Lethokov, S. Martellucci Eds. pp. 1-32 (Plenum Press, N. Y. 1988).
3. R. Tennant: "Control of contaminants in XeCl lasers" Laser Focus 10, 65 (1981).
4. J. Levatter, S. Lin: "Necessary conditions for the homogeneous formation of pulsed avalanche discharges at high gas pressures" J. Appl. Phys. 51, 210 (1980);
5. R. Taylor: "Preionisation and discharge stability study of long optical pulse duration UV preionised XeCl lasers" Appl. Phys. B41, 1 (1986).
6. ∗ electron-avalanched discharges", II Nuovo Cimento D13, 1387 (1991).
7. K. Midorikawa, M. Obara, T. Fujioka: "X-ray preionisation of rare-gas-halide lasers" IEEE J. QE-20, 198 (1984).
8. T. Letardi, P. Di Lazzaro, G. Giordano, C. E. Zheng: "Large area X-ray preionizer for electric discharge lasers", Appl. Phys. B48, 55 (1989).
9. S. Bollanti, P. Di Lazzaro, F. Flora, G. Giordano, T. Letardi, G. Schina, C. E. Zheng: "Parametric study of an X-ray preionizer with plasma cathode", Rev. Sci. Instrum. 65, 315 (1994).
10. G. Giordano, T. Letardi, C. E. Zheng: "Preionization electron density measurement by collecting electric charge" Il Nuovo Cimento 101B, 569 (1988).
11. T. Letardi, S. Bollanti, P. Di Lazzaro, F. Flora, N. Lisi, C. E. Zheng: "Some design limitations for large-aperture high-energy per pulse excimer lasers", II Nuovo Cimento D14, 495 (1992).
12. S. Bollanti, P. Di Lazzaro, F. Flora, G. Giordano, T. Letardi, N. Lisi, G. Schina, C. E. Zheng: "X-ray triggering of a ten litre discharge excimer laser" Proc. Int. Conf on Lasers'89, D. Harris, T. Shay Eds. pp. 139-144 (STS Mc Lean, 1990).
13. P. Corkum, R. Taylor: "Picosecond amplification and kinetic study of XeCl" IEEE J. QE-18, 1162 (1982).
14. L. Champagne, A. Dudas, N. Harris: "Current risetime limitation of large volume X-ray preionised XeCl laser" J. Appl. Phys. 62, 1576 (1987).
15. T. Letardi, F. Flora, C. E. Zheng: "Inductance calculation of discharge chamber for transversely gas flow laser system" Il Nuovo Cimento D15, 1507 (1993).
16. K. Jayaram, A. Alcock: "X-ray initiated high pressure glow discharge" Appl. Phys. Lett. 46, 636 (1984);
17. B. Lacour, C. Vannier: "Phototriggering of a 1-J excimer laser using either UV or X-rays" J. Appl. Phys. 62, 754 (1987).
18. S. Bollanti, P. Di Lazzaro, F. Flora, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng: "Performance of a ten-litre electron avalanche discharge XeCl laser device", Appl. Phys. B50, 415 (1990).
19. S. Bollanti, T. Letardi, C. E. Zheng: "Effect of preionization on uniformity of phototriggered XeCl laser discharges: modelling and comparison with experimental results" IEEE Trans. Plasma Sci. 19, 361 (1991).
20. P. Di Lazzaro, T. Letardi, C. E. Zheng: "Discharge medium uniformity influence on XeCl excimer laser beam quality", Il Nuovo Cimento D14, 41 (1992).
21. M. Turner: "Modelling the self-sustained discharge excited XeCl laser in two dimensions" J. Appl. Phys. 71, 2113 (1992).
22. T. Chang: "Improved uniform-field electrode profiles for TEA laser and high voltage applications" Rev. Sci. Instr. 44, 405 (1973).
23. G. Ernst: "Uniform field electrodes with minimum width" Opt. Comm. 49, 275 (1984).
24. E. Stappaerts: "A novel analytical design method for discharge laser electrode profiles" Appl. Phys. Lett. 40, 1018 (1982).
25. P. Di Lazzaro, G. Giordano, L. Mezi, C. E. Zheng: "Field uniformity of discharge lasers: electrode profiles and current return path effect", Opt. & Laser Tech. 26, 15 (1994).
26. See, e.g., S. Ito: Appl. Phys. B63, 1 (1996) and references therein.
27. S. Bollanti, P. Di Lazzaro, F. Flora, G. Giordano, T. Letardi, N. Lisi, G. Schina, C. E. Zheng: "Large volume XeCl laser with longitudinal gas flow" Proc. SPIE 1397, 97 (1990).
28. P. Di Lazzaro: "Design of a high optical quality excimer laser: influence of discharge uniformity and optical cavity", Current Topics in Quantum Electronics 1, 53 (1994).
29. A. Siegman: Lasers Ch. 22-23 (University Science Books, Mill Valley CA, 1986);
30. -: "Performance limitations of the self-filtering unstable resonator" Opt. Comm. 88, 295 (1992).
31. T. McKee: "Optical cavity design for long pulse excimer lasers" Appl. Opt. 30, 635 (1991).
32. S. Bollanti, P. Di Lazzaro, F. Flora, T. Letardi, N. Lisi, C. E. Zheng: "Space- and time-resolved discharge evolution of a large volume X-ray triggered XeCl laser system", Appl. Phys. B55, 84 (1992).
33. N. Lisi, P. Di Lazzaro, F. Flora: "Time-resolved divergence measurement of an excimer laser beam by the knife-edge technique", Optics Comm. 136, 247 (1997);
34. P. Di Lazzaro, F. Flora, N. Lisi: "Measurement of the time-resolved divergence of pulsed laser beams", this issue.
35. S. Bollanti, R. Cotton, P. Di Lazzaro, F. Flora, T. Letardi, N. Lisi, D. Batani, A. Conti, L. Palladino, A. Reale, M. Belli, F. Ianzini, A. Scafati, L. Reale, A. Faenov, T. Pikuz, A. Osterheld: "Development and characterisation of an XeCl excimer laser-generated soft-X-ray plasma source and its applications", Il Nuovo Cimento D18, 1241 (1996).
36. K. Oughstun: "Aberration sensitivity of unstable-cavity geometries" J. Opt. Soc. Am. A3, 1113 (1986).
37. T. Letardi, P. Di Lazzaro, C. E. Zheng: "Influence of unstable cavity optical component aberrations on laser beam divergence", Opt. Quantum El. 26, 957 (1994).
38. See, e.g., K. Schutte, H. Bergmann: "Excimer laser beam interaction with metals and ceramics", Excimer Lasers NATO ASI Series, L. Laude Ed. pp. 355-386 (Kluwer Academic Publisher, 1994).
39. S. Tosto, A. Di Bartolomeo, P. Di Lazzaro: "Surface ablation by excimer laser irradiation of Ti and Ti6A14V alloy", Appl. Phys. A63, 385 (1996).
40. S. Tosto, P. Di Lazzaro, T. Letardi, S. Martelli: "Metal surface treatment by high-energy UV pulses", Proc. SPIE 1138, 208 (1988).
41. F. O'Neill: "Laser plasma XUV sources", Laser plasma interactions 4, M. Hooper Ed. pp. 285-315 (35 Scottish university summer school in Physics, 1988).
42. L. Palladino, A. Reale, G. Taglieri, D. Batani, S, Bollanti, P. Di Lazzaro, F. Flora, T, Letardi, G. Schina, M. Belli, A. Scafati: "XUV generation from plasma produced by a XeCl excimer laser on a Cu target", Il Nuovo Cimento D15, 1133 (1993);
43. S. Bollanti et al.: "Long duration soft X-ray pulses by XeCl laser driven plasmas and applications" J. X-ray Sci. Tech. 5, 261 (1995).
44. P. Albertano et al.: "X-ray contact microscopy using an excimer plasma source with different target materials and laser pulse duration" J. Microscopy, in press (1997).
45. L. Magunov et al.: "Precision measurement of ground state and wavelengths of the nI-2F spectral lines of Ne-like ion Ni XIX" JETP 83, 267 (1996).
46. S. Bollanti et al.: "Na-like autoionization states of Cu ions in plasma" Physica Scripta 51, 326 (1995).
47. S. Bollanti et al.: "X-ray plasma source pumped by a large volume excimer laser", this issue.
48. T. Bahners, E. Schollmayer: "Morphological changes of the surface structure of polymers due to excimer laser radiation: a synergetic effect?" J. Appl. Phys. 66, 1884 (1989).
49. P. Di Lazzaro, G. Schina, R. De Maria, E. Gesi, A. Cerretini: "Trattamento di superfici tessili con laser ad eccimeri", Energia, Ambiente e Innovazione 4, 29 (1995).
50. See, e.g., "Comparison of thin film transistors and SOI technologies" Proc. Mat. Res. Soc. Symp. 33, H. Lam, M. Thompson Eds. (North Holland, N. Y. 1984).
51. D. Zankowsky: "Flat panel displays benefit from laser processing" Laser Focus World pp. 139-141 (March 1994)