A new capacitive displacement sensor with high accuracy and long-range

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 135-141

  Kim, Moojin ^a   Moon, Wonkyu ^a   Yoon, Euisung ^b   Lee, Kwang Ryeol ^b  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Capacitive displacement sensor; Contact type; DLC; Encoder; High resolution

Indexed keywords

CAPACITANCE; CARBON; DIELECTRIC FILMS; DIFFRACTION GRATINGS; ERROR ANALYSIS; MICROELECTRODES; MICROMACHINING; OPTICAL RESOLVING POWER; SUBSTRATES;

CAPACITIVE DISPLACEMENT SENSORS; CONTACT-TYPES; DLC; ENCODERS; HIGH RESOLUTION;

SENSORS;

EID: 33745946635     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.012     Document Type: Article

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