Piezoelectric aluminum nitride thin film for ultrasonic transducers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4559, Issue , 2001, Pages 95-102

  Valbin, Laurie ^a   Sevely, Laure ^a  

^a Groupe ESIEE   (France)

Author keywords

Aluminum Nitride; Micromachined ultrasonic transducer; Piezoelectric thin film

Indexed keywords

ALUMINUM NITRIDE; ARGON; DOPPLER EFFECT; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; REACTIVE ION ETCHING; ULTRASONIC TRANSDUCERS;

LAMB WAVE DEVICES;

THIN FILMS;

EID: 0035763360     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443023     Document Type: Article

References (6)

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