Computation of 3D MEMS electrostatics using a nearly exact BEM solver

Engineering Analysis with Boundary Elements

Volumn 30, Issue 8, 2006, Pages 687-696

  Muhkopadhyay, S ^a   Majumdar, N ^a  

^a SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

Boundary element method; Electrostatics; Green function; MEMS; Thin plates

Indexed keywords

BOUNDARY ELEMENT METHOD; CARRIER CONCENTRATION; ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; ELECTROSTATICS; ELEMENTARY PARTICLE SOURCES; GREEN'S FUNCTION; MATHEMATICAL MODELS; PROBLEM SOLVING;

FORCE FIELD; MEMS; PARALLEL PLATE CAPACITOR; THIN PLATES;

MICROELECTROMECHANICAL DEVICES;

EID: 33745931385     PISSN: 09557997     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.enganabound.2006.03.002     Document Type: Article

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