Characterization of implanted ion sites by X-ray absorption spectroscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 126-128

  Traverse, Agnès ^a  

^a SYNCHROTRON SOLEIL   (France)

Author keywords

Ion implantation; Phase formation; X ray absorption spectroscopy

Indexed keywords

ABSORPTION SPECTROSCOPY; METAL INSULATOR BOUNDARIES; NEGATIVE IONS; X RAY ANALYSIS;

ION INCIDENT ENERGY; METALLIC IONS; PHASE FORMATION; X RAY ABSORPTION SPECTROSCOPY;

ION IMPLANTATION;

EID: 33745830511     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.096     Document Type: Article

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