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Journal of Materials Research

Volumn 16, Issue 2, 2001, Pages 512-523

Characterization of bond formation in SiC and Si3N4 implanted with Ti, Fe, and Co

(4) Zanghi, Didier a Traverse, Agnès a Gautrot, Sébastien b Kaïtasov, Odile b

a UNIVERSITÉ PARIS SACLAY (France)

b 91405 Orsay Campus (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CHARACTERIZATION; CHEMICAL BONDS; COBALT; ION IMPLANTATION; IRON; PRECIPITATION (CHEMICAL); SILICON CARBIDE; SILICON NITRIDE; TITANIUM;

IMPLANTED OXIDES;

CERAMIC MATERIALS;

EID: 0035262053 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0074 Document Type: Article

Times cited : (10)

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