Fabrication challenges for a complicated micro-flow channel system at low temperature process

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 575-582

  Liu, C W ^a   Gau, C ^b   Ko, H S ^b   Yang, C S ^c   Dai, B T ^a  

^a NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c FAR EAST UNIVERSITY   (Taiwan)

Author keywords

Integrated system; Low temperature process; Microchannel fabrication

Indexed keywords

COOLING; HEAT TRANSFER; HEAT TRANSFER COEFFICIENTS; LOW TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; PROBLEM SOLVING; SENSORS;

INTEGRATED SYSTEM; LOW TEMPERATURE PROCESS; MICRO-FLOW CHANNEL SYSTEM; MICROCHANNEL FABRICATION; TEMPERATURE SENSORS;

CHANNEL FLOW;

EID: 33745814353     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.09.009     Document Type: Article

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