PIXE depth profiling using variation of detection angle

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 394-396

  Miranda, J ^a   Rickards, J ^a   Trejo Luna, R ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Depth profiling; Detection angle; Implanted ions; PIXE; Thin films

Indexed keywords

ALGORITHMS; ION IMPLANTATION; METALLIC FILMS; THIN FILMS; X RAYS;

DEPTH PROFILING; DETECTION ANGLE; IMPLANTED IONS; PIXE;

ELECTROMAGNETIC WAVE EMISSION;

EID: 33745805879     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.04.062     Document Type: Article

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