Membrane mirror light modulator technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3951, Issue , 2000, Pages 191-199

  Warde, C ^a   McCann, J ^a   Shrauger, V ^a   Ieong, H ^a   Ersen, A ^a   Wang, X Y ^a   Hubbard, J ^a  

^a Optron Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLITUDE MODULATION; CMOS INTEGRATED CIRCUITS; DEFORMATION; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE DIFFRACTION; INTEGRATED OPTOELECTRONICS; METALLIZING; MIRRORS; OPTICAL FILTERS; PHASE MODULATION; REFLECTIVE COATINGS; VLSI CIRCUITS;

LIGHT SHUTTERS; LIGHT VALVES; MEMBRANE MIRROR LIGHT MODULATORS;

LIGHT MODULATORS;

EID: 0033897439     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)