Preparing a TEM sample from a polished metallographic section;Präparation einer TEM-probe aus einem metallographischen schliff

Praktische Metallographie/Practical Metallography

Volumn 43, Issue 6, 2006, Pages 306-315

  Mühle, Uwe ^a   Jansen, Sören ^a   Leinen, Susann ^a   Breuer, Dirk ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); ION BEAMS; MICROPROCESSOR CHIPS; SCANNING ELECTRON MICROSCOPY; SOLDERED JOINTS; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAM MACHINES; INTERFACIAL SYSTEMS; LIFTOUT SYSTEMS;

MATERIALS SCIENCE;

EID: 33745785661     PISSN: 0032678X     EISSN: None     Source Type: Journal    
DOI: 10.3139/147.100304     Document Type: Article

References (7)

1. Prewett, P.D.; Mair, G.L.R.: Focused Ion Beams from Metal Ion Sources; Research Studies Press Ltd. Swason, Somerset (England) 1991
2. Stevie, F.A.; Shane, T.C.; Kahora, P.M.; Hull, R.; Bahnck, D.; Kannan, V.C.; David, E.: Surf. Interface Anal. 23, 61 (1995)
3. www.itwissen.info/?oid=354&id=30
4. www.imec.be/IMECAT/documents/05_2003_Productronic_Parton_paper.pdf
5. Ritz, Y.; Stegmann, H.; Engelmann, H.-J.; Zschech, E.: Praktische Metallographie 41 (2005) 180-189
6. Zribi, A.; Clark, A.; Zavalij, L.; Borgesen, P.; Cotts, E.J.: Journ of Electronic materials 30 (2001) 1157-1164
7. Chiu, T.; Zeng, K.; Stierman, R.; Edwards, D.; Ano, K.: IEEE, Electronic Components and Technology Conference 2004 1256-1262