Investigation of immersion related defects using pre- And post-wet experiments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6154 I, Issue , 2006, Pages

  Brandl, Stefan ^a   Watso, Robert ^b   Pierson, Bill ^b   Holmes, Steve ^c   Wei, Yayi ^a   Petrillo, Karen ^c   Cummings, Kevin ^b   Goodwin, Frank ^a  

^a INFINEON TECHNOLOGIES   (United States)

^b ASML US Inc   (United States)

^c IBM   (United States)

Author keywords

Defects; Immersion; Immersion hood hover; Lithography; Post wet; Pre wet

Indexed keywords

DEFECTS; IMAGING TECHNIQUES; LITHOGRAPHY; PROTECTIVE COATINGS;

IMMERSION; IMMERSION HOOD HOVER; POST-WET; PRE-WET;

WSI CIRCUITS;

EID: 33745785440     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656697     Document Type: Conference Paper

References (5)

1. nd International Symposium on Immersion Lithography, September 2005 Brugge, Belgium.
2. nd International Symposium on Immersion Lithography, September 2005 Brugge, Belgium.
3. U. Okoroanyanwu, J. Kye, N. Yamamoto, K. Cummings, "Detectivity in water immersion lithography", Microlithography World, Vol. 14, No. 4, November 2005.
4. nd International Symposium on Immersion Lithography, September 2005 Brugge, Belgium.
5. nd International Symposium on Immersion Lithography, September 2005 Brugge, Belgium.