System integration of high voltage electrostatic MEMS actuators

3rd International IEEE Northeast Workshop on Circuits and Systems Conference, NEWCAS 2005

Volumn 2005, Issue , 2005, Pages 155-158

  Saheb, Jean François ^a,b   Richard, Jean François ^a   Meingan, R ^a   Sawan, M ^b   Savaria, Y ^b  

^a DALSA Semiconductor Inc   (Canada)

^b ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; INTERFACES (COMPUTER); MACHINE DESIGN; MICROELECTROMECHANICAL DEVICES; PRINTED CIRCUIT BOARDS; VOLTAGE CONTROL;

CAPACITIVE LOADS; ELECTROSTATIC MEMS; SYSTEM IN PACKAGE (SIP);

ACTUATORS;

EID: 33745767523     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEWCAS.2005.1496677     Document Type: Conference Paper

References (9)

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