Geometrical scaling effects in high permittivity capacitors

Integrated Ferroelectrics

Volumn 80, Issue 1, 2006, Pages 437-442

  Pervez, Nadia K ^a   Park, Jaehoon ^a   Lu, Jiwei ^a   Stemmer, Susanne ^a   York, Robert A ^a  

^a University of California   (United States)

Author keywords

Barium strontium titanate; Bismuth zinc niobate; Dielectric properties; Inegrated passives

Indexed keywords

BARIUM STRONTIUM TITANATE; BISMUTH ZINC NIOBATE; INEGRATED PASSIVES; SCALING EFFECTS;

CURRENT DENSITY; DIELECTRIC PROPERTIES; ELECTRODES; INTEGRATED CIRCUITS; LEAKAGE CURRENTS; PERMITTIVITY;

CAPACITORS;

EID: 33745759014     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600663235     Document Type: Article

References (10)

1. A. Tombak, J. P. Maria, F. T. Ayguavives, Z. Jin, G. T. Stauf, A. I. Kingon, and A. Mortzawi, "Voltage-Controlled RF Filters Employing Thin-Film Barium-Strontium-Titanate Tunable Capacitors," IEEE Trans. Microwave Theory Tech. 51, 462-467 (2003).
2. T. S. Kalkur, C. Cotey, K. Chen, and S. Sun, "Tunable Voltage-Controlled Oscillator (VCO) With High Dielectric Constant BCTZ Capacitors," Integrated Ferroelectrics 56, 1123-1129 (2003).
3. M. Jain, N. K. Karan, R. S. Katyar, A. S. Bhalla, F. A. Miranda, and F. W. Van Keuls, "Pb0.3Sr0.7TiO3 Thin Films For High-Frequency Phase Shifter Applications," Appl. Phys. Lett. 85, 275-277 (2004).
4. D. Kim, Y. Choi, M. G. Allen, J. S. Kenney, and D. Kiesling, "A Wide Bandwidth Monolithic BST Reflection-Type Phase Shifter Using a Coplanar Waveguide Lange Coupler," IEEE MTT-S Int. Microwave Symp. Dig. 3, 1471-1474 (2002).
5. B. Acikel, T. R. Taylor, P. J. Hansen, J. S. Speck, and R. A. York, "A New High Performance Phase Shifter Using BaxSr1-xTiO3 Thin Films," IEEE Microwave Wireless Comp. Lett. 12, 237-239 (2002).
6. H. Xu, N. K. Pervez, P. J. Hansen, L. Shen, S. Keller, U. K. Mishra, and R. A. York, "Integration of BaxSrl-xTiO3 Thin Films With AlGaN/GaN HEMT Circuits," IEEE Elec. Dev. Lett. 25, 49-51 (2004).
7. N. K. Pervez, P. J. Hansen, and R. A. York, "High Tunability Barium Strontium Titanate Thin Films for rf Circuit Applications," Appl. Phys. Lett. 85, 4451-4453 (2004).
8. J.W. Lu and S. Stemmer, "Low-Loss, Tunable Bismuth Zinc Niobate Thin Films Deposited by rf Magnetron Sputtering," Appl. Phys. Lett. 83, 2411-2413 (2003).
9. D. R. Chase, L. Y. Chen, and R. A. York, "Modeling the Capacitive Nonlinearity in Thin-Film Dielectric Varactors," IEEE Trans Microwave Theory Tech, 53, 3215-3220 (2005).
10. L. Y. Chen, private communication.