Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons

Optics Letters

Volumn 31, Issue 11, 2006, Pages 1666-1668

  Grunwald, Ruediger ^a   Neumann, Uwe ^a   Rosenfeld, Arkadi ^a   Li, Jianzhao ^b   Herman, Peter R ^b  

^a MAX BORN INSTITUT   (Germany)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSTRUCTURING; NANOLAYER MICROAXICONS; SHADOW-MASK VAPOR DEPOSITION;

MAGNESIUM COMPOUNDS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SUBSTRATES; ULTRAVIOLET RADIATION; VACUUM;

MICROMACHINING;

EID: 33745741281     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.31.001666     Document Type: Article

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