Wet etching of sol-gel deposited lead lanthanum zirconate titanate for photonic crystal applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6128, Issue , 2006, Pages

  Lee, Yun Ju ^a   Subramania, Ganapathi ^a   Clem, Paul G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Electrooptic; Photonic crystal; PLZT; Refractive index tuning; Resonant microcavity; Sol gel; Wet etch

Indexed keywords

PHOTONIC CRYSTALS; REFRACTIVE INDEX TUNING; RESONANT MICROCAVITIES; WET ETCHING;

ELECTRODES; ELECTROOPTICAL EFFECTS; ETCHING; HYDROCHLORIC ACID; LANTHANUM COMPOUNDS; PLATINUM; SOL-GELS; THIN FILMS;

CRYSTALS;

EID: 33745597315     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.646570     Document Type: Conference Paper

References (15)

1. G. H. Haertling and C. E. Land, J. Am. Ceram. Soc, 54, 1 (1971).
2. S. S. Eaton, D.B. Butler, M. Parris, D. Wilson and H. McNeielle, Dig. Tech. Pap. 31, 130 (1988).
3. K. Suu, A. Osawa, N. Tani. M. Ishikawa, K. Nakamura, T. Ozawa, K. Sameshima, A. Kamisawa and H. Takasu, Jpn. J. Appl. Phys. 35, 4967 (1996).
4. V. E. Wood, J. R. Bush, S. D. Ramamurthi and S. L. Swartz, J. Appl. Phys. 71, 4557 (1992).
5. B. Tunaboylu, P. Harvey and S. C. Esener, IEEE Trans. Ultrason. Ferroelec. Freq. Cont. 45, 1105 (1998).
6. R. C. Alferness in Guided-Wave Optoelectronics, T. Tamir ed., Springer-Verlag, Berlin, 145 (1990).
7. S. J. Lockwood, R.W. Schwartz, B.A. Tuttle and E. V. Thomas, Sandia National Laboratories Reports 92-2490c (1992).
8. K. Nashimoto, S. Nakamura, T. Morikawa, H. Moriyama, M. Watanabe and E. Osakabe, Appl. Phys. Lett. 74, 2761 (1999).
9. E. Chow, S. Y. Lin, S. G. Johnson, P. R. Villeneuve, J. D. Joannopoulos, J. R. Wendt, G. A. Vawter, W. Zubrzycki, H. Hou and A. Alleman, Nature 407, 983 (2000).
10. S. Noda, A. Chutinan and M.Imada, Nature 407, 608 (2000).
11. G. Subramania, S. Y. Lin, J. R. Wendt, J. M. Rivera, Appl. Phys. Lett 83, 4491 (2003).
12. H. Kosaka, T. Kawashima, A. Tomita, M. Notomi, T. Tamamura, T. Sato and S. Kawakami, Phys. Rev. B 58, 10096 (1998).
13. L. J. Wu, M. Mazilu, T. Karle and T. F. Krauss, IEEE J. Quantum Electron. 38, 915 (2002).
14. D. Scrymgeour, N. Malkova, S. Kim and V. Gopalan, Appl Phys. Lett 82, 3176 (2003).
15. T. Aoki, K. Kuwabara, M. Kondo, M. Tsukada, K. Kurihara and N. Kamehara, Appl Phys. Lett. 85, 2580 (2004).