Measuring the thickness of organic/polymer/biological films on glass substrates using spectroscopic ellipsometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1605-1609

  Tompkins, Harland G ^a   Tiwald, Tom ^a   Bungay, Corey ^a   Hooper, Andrew E ^b  

^a J A WOOLLAM CO INC   (United States)

^b Electro Scientific Industries Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM MATERIALS; ORGANIC FILMS; POLYMERIC FILMS; SPECTROSCOPIC ELLIPSOMETRY;

BIOFILMS; ELLIPSOMETRY; GLASS; MOLECULAR VIBRATIONS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SUBSTRATES; THICKNESS MEASUREMENT;

PLASTIC FILMS;

EID: 33745500693     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2172945     Document Type: Article

References (9)

1. H. G. Tompkins and W. A. MaGahan, Spectroscopic Ellipsometry and Reflectometry: A User's Guide (Wiley, New York, 1999).
2. H. G. Tompkins, T. Tiwald, C. Bungay, and A. E. Hooper, J. Phys. Chem. B 108, 3777 (2004).
3. H. G. Tompkins, S. Smith, and D. Convey, Surf. Interface Anal. 29, 8045 (2000).
4. N. Blayo and B. Dŕvillon, Appl. Phys. Lett. 57, 786 (1990).
5. N. Bertrand, B. Dŕvillon, and P. Bulkin, J. Vac. Sci. Technol. B 16, 63 (1998).
6. N. Bertrand, B. Dŕvillon, J. E. Klemberg-Sapieha, and L. Martinu, Thin Solid Films 290-291, 264 (1996).
7. E. Garcia-Caurel, B. Dŕvillon, A. De Martino, and L. Schwartz, Appl. Opt. 41, 7339 (2002).
8. C. W. Meuse, Langmuir 16, 9483 (2000).
9. A. E. Hooper and H. G. Tompkins, Surf. Interface Anal. 31, 805 (2001).