Real-time spectroscopic ellipsometry studies of the growth of amorphous and epitaxial silicon for photovoltaic applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1676-1683

  Levi, D H ^a   Teplin, C W ^a   Iwaniczko, E ^a   Yan, Y ^a   Wang, T H ^a   Branz, H M ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL FILMS; HOT WIRE; PHOTOVOLTAIC ENERGY CONVERSION EFFICIENCY; WAFER;

CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; ENERGY CONVERSION; EPITAXIAL GROWTH; FILM GROWTH; OPTIMIZATION; PHOTOVOLTAIC CELLS; REAL TIME SYSTEMS; SPECTROSCOPIC ANALYSIS; SUBSTRATES; THIN FILMS;

SILICON;

EID: 33745498761     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2167083     Document Type: Article

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