Fabrication of on-chip microcapillary using photosensitive glass

Microsystem Technologies

Volumn 9, Issue 8, 2003, Pages 541-545

  Etoh, S ^a   Fujimura, T ^a   Hattori, R ^a   Kuroki, Y ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FABRICATION; HYDROFLUORIC ACID; MICROMACHINING; PHOTOLITHOGRAPHY; PHOTOSENSITIVE GLASS;

ON-CHIP MICROCAPILLARY;

MICROPROCESSOR CHIPS;

EID: 0344035564     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0300-4     Document Type: Article

References (8)

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