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Volumn 592, Issue 2, 2006, Pages 153-162
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Investigation of the electrical properties, charging process, and passivation of RuO2-Ta2O5 oxide films
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Author keywords
Deactivation mechanism; Electrical properties; Impedance; Ruthenium and tantalum oxide
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Indexed keywords
CYCLIC VOLTAMMETRY;
ELECTRIC PROPERTIES;
ENERGY DISPERSIVE SPECTROSCOPY;
PASSIVATION;
SCANNING ELECTRON MICROSCOPY;
SPECTROSCOPIC ANALYSIS;
DEACTIVATION MECHANISM;
ELECTRODE COMPOSITION;
RUTHENIUM AND TANTALUM OXIDE;
TI/OXIDE INTERFACE;
THIN FILMS;
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EID: 33745431122
PISSN: 15726657
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jelechem.2006.05.004 Document Type: Article |
Times cited : (34)
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References (53)
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