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Volumn 31, Issue 9, 2006, Pages 1316-1318
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Development of high-throughput, high-damage-threshold beam separator for 13 nm high-order harmonics
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Author keywords
[No Author keywords available]
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Indexed keywords
ATTENUATION RATIO;
BEAM SEPARATOR;
NIOBIUM NITROGEN FILM;
X RAY LASERS;
ATTENUATION;
HARMONIC ANALYSIS;
LASER PULSES;
MAGNETRON SPUTTERING;
NIOBIUM COMPOUNDS;
SILICON;
SUBSTRATES;
THIN FILMS;
X RAY ANALYSIS;
OPTICAL BEAM SPLITTERS;
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EID: 33745132738
PISSN: 01469592
EISSN: 15394794
Source Type: Journal
DOI: 10.1364/OL.31.001316 Document Type: Article |
Times cited : (26)
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References (9)
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