Observation of isolated nanopores formed by patterned anodic oxidation of aluminum thin films

Applied Physics Letters

Volumn 88, Issue 23, 2006, Pages

  Huang, Qiyu ^a   Lye, Whye Kei ^b   Reed, Michael L ^b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM THIN FILMS; BEAM MILLING; NANOIMPRINT LITHOGRAPHY; NANOPORES;

ALUMINA; ALUMINUM FOIL; ANODIC OXIDATION; CARBOXYLIC ACIDS; ION BEAM LITHOGRAPHY; MASKS; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 33745042865     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2212535     Document Type: Article

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