Fabrication of microstructures using aluminum anodization techniques

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 274-277

  Nadeem, Ahmed ^a   Mescher, Mark ^a   Rebello, Keith ^a   Weiss, Lee E ^a   Wu, Clarence ^a   Feldman, Marc ^a   Reed, Michael L ^a  

^a UNIVERSITY OF PITTSBURGH MEDICAL CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ANODIC OXIDATION; ASPECT RATIO; ETCHING; LITHOGRAPHY; MASKS; SUBSTRATES;

HIGH ASPECT RATIO MICROSTRUCTURES; REACTIVE ION ETCHING PROCESS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031703289     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)