메뉴 건너뛰기




Volumn 44, Issue 10, 2006, Pages 1927-1942

Performance evaluation of two methods for online monitoring of linear calibration profiles

Author keywords

Average run length; Profile monitoring; Simple linear regression; Statistical process control

Indexed keywords

CALIBRATION; COMPUTER SIMULATION; ERROR ANALYSIS; PARAMETER ESTIMATION; REGRESSION ANALYSIS;

EID: 33745007601     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540500409855     Document Type: Article
Times cited : (146)

References (20)
  • 1
    • 0000496391 scopus 로고
    • Estimation of a linear function for a calibration line; consideration of a recent proposal
    • Berkson, J., Estimation of a linear function for a calibration line; consideration of a recent proposal. Technometrics, 1969, 11, 649-660.
    • (1969) Technometrics , vol.11 , pp. 649-660
    • Berkson, J.1
  • 3
    • 0007301305 scopus 로고
    • Measurement assurance for dimensional measurements on integrated-cireuit photomasks
    • US Department of Commerce, Washington, DC, USA
    • Croarkin, C. and Varner, R., Measurement assurance for dimensional measurements on integrated-cireuit photomasks. NBS Technical Note 1164, US Department of Commerce, Washington, DC, USA, 1982.
    • (1982) NBS Technical Note , vol.1164
    • Croarkin, C.1    Varner, R.2
  • 4
    • 0004296311 scopus 로고    scopus 로고
    • ISO 11095:1996, Geneva, Switzerland
    • International Organisation for Standardisation, Linear calibration using reference materials. ISO 11095:1996, Geneva, Switzerland, 1996.
    • (1996) Linear Calibration Using Reference Materials
  • 5
    • 0035359901 scopus 로고    scopus 로고
    • Automatic feature extraction of waveform signals for in-process diagnostic performance improvement
    • Jin, J. and Shi, J., Automatic feature extraction of waveform signals for in-process diagnostic performance improvement. J. Intel. Manuf., 2001, 12, 257-268.
    • (2001) J. Intel. Manuf. , vol.12 , pp. 257-268
    • Jin, J.1    Shi, J.2
  • 6
    • 1642541495 scopus 로고    scopus 로고
    • On-line monitoring when the process yields a linear profile
    • Kang, L. and Albin, S.L., On-line monitoring when the process yields a linear profile. J. Qual. Tech., 2000, 32, 418-426.
    • (2000) J. Qual. Tech. , vol.32 , pp. 418-426
    • Kang, L.1    Albin, S.L.2
  • 7
    • 1642519894 scopus 로고    scopus 로고
    • On the monitoring of linear profiles
    • Kim, K., Mahmoud, M.A. and Woodall, W.H., On the monitoring of linear profiles. J. Qual. Tech., 2003, 35, 317-328.
    • (2003) J. Qual. Tech. , vol.35 , pp. 317-328
    • Kim, K.1    Mahmoud, M.A.2    Woodall, W.H.3
  • 8
    • 84946632251 scopus 로고
    • Classical and inverse regression methods of calibration
    • Krutchkoff, R.G., Classical and inverse regression methods of calibration. Technometrics, 1967, 9, 425-439.
    • (1967) Technometrics , vol.9 , pp. 425-439
    • Krutchkoff, R.G.1
  • 9
    • 0014553696 scopus 로고
    • Classical and inverse regression methods of calibration in extrapolation
    • Krutchkoff, R.G., Classical and inverse regression methods of calibration in extrapolation. Techonometrics, 1969, 11, 605-608.
    • (1969) Techonometrics , vol.11 , pp. 605-608
    • Krutchkoff, R.G.1
  • 10
    • 8344221961 scopus 로고    scopus 로고
    • Phase I analysis of linear profiles with calibration applications
    • Mahmoud, M.A. and Woodall, W.H., Phase I analysis of linear profiles with calibration applications. Technometrics, 2004, 46, 377-391.
    • (2004) Technometrics , vol.46 , pp. 377-391
    • Mahmoud, M.A.1    Woodall, W.H.2
  • 13
    • 1642519849 scopus 로고    scopus 로고
    • Analysis of functional responses from robust design studies
    • Nair, V.N., Taam, W. and Ye, K.Q., Analysis of functional responses from robust design studies. J. Qual. Tech., 2002, 34, 355-370.
    • (2002) J. Qual. Tech. , vol.34 , pp. 355-370
    • Nair, V.N.1    Taam, W.2    Ye, K.Q.3
  • 14
    • 0041954178 scopus 로고    scopus 로고
    • accessed 21 December 2005
    • NIST/SEMATECH e-Handbook of Statistical Methods. Available online at: http://www.itl.nist.gov/div898/handbook/mpc/section3/mpc37.htm (accessed 21 December 2005).
    • NIST/SEMATECH e-Handbook of Statistical Methods
  • 15
    • 18144373073 scopus 로고    scopus 로고
    • In-line process and product control using spectroscopy and multivariate calibration
    • Sahni, N.S., Aastveit, A.H. and Naes, T., In-line process and product control using spectroscopy and multivariate calibration. J. Qual. Tech., 2005, 37, 1-20.
    • (2005) J. Qual. Tech. , vol.37 , pp. 1-20
    • Sahni, N.S.1    Aastveit, A.H.2    Naes, T.3
  • 16
    • 0032562633 scopus 로고    scopus 로고
    • Statistical quality control applied to ion chromatography calibrations
    • Stover, F.S. and Brill, R.V., Statistical quality control applied to ion chromatography calibrations. J. Chromatography A, 1998, 804, 37-43.
    • (1998) J. Chromatography A , vol.804 , pp. 37-43
    • Stover, F.S.1    Brill, R.V.2
  • 18
    • 0000157610 scopus 로고
    • A note on regression methods in calibration
    • Williams, E.J., A note on regression methods in calibration. Technometrics, 1969, 11, 189-192.
    • (1969) Technometrics , vol.11 , pp. 189-192
    • Williams, E.J.1
  • 19
    • 0001346491 scopus 로고    scopus 로고
    • Controversies and contradictions in statistical process control (with discussion)
    • Woodall, W.H., Controversies and contradictions in statistical process control (with discussion). J. Qual. Tech., 2000, 32, 341-378.
    • (2000) J. Qual. Tech. , vol.32 , pp. 341-378
    • Woodall, W.H.1
  • 20
    • 8344246718 scopus 로고    scopus 로고
    • Using control charts to monitor process and product quality profiles
    • Woodall, W.H., Spitzner, D.J., Montgomery, D.C. and Gupta, S., Using control charts to monitor process and product quality profiles. J. Qual. Tech., 2004, 36, 309-320.
    • (2004) J. Qual. Tech. , vol.36 , pp. 309-320
    • Woodall, W.H.1    Spitzner, D.J.2    Montgomery, D.C.3    Gupta, S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.