Determination of thickness, density and roughness of Co-Ni-Al single and multiple layer films deposited by high-vacuum e-beam evaporation on different substrates

Materials Characterization

Volumn 57, Issue 1, 2006, Pages 12-16

  Baake, O ^a   Oksuzoglu R M ^a,b   Flege, S ^a   Hoffmann, P S ^a   Gottschalk, S ^a   Fuess, H ^a   Ortner, H M ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b ANADOLU UNIVERSITY   (Turkey)

Author keywords

Multiple layers; Roughness; Thickness; X ray reflectometry

Indexed keywords

ALUMINUM COMPOUNDS; COBALT COMPOUNDS; DEPOSITION; NICKEL COMPOUNDS; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

MULTIPLE LAYERS; THICKNESS; X-RAY REFLECTOMETRY;

THIN FILMS;

EID: 33744976993     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2005.12.001     Document Type: Article

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