Preparation of polysiloxazanes and their transformation to silicon oxynitride

Journal of the Ceramic Society of Japan

Volumn 114, Issue 1330, 2006, Pages 492-496

  Gunji, Takahiro ^a   Taniguchi, Yoshinori ^a   Abe, Yoshimoto ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Ammonolysis; Isocyanatosiliane; Polysiloxazane; Pyrolysis; Silicon oxynitride

Indexed keywords

AMMONIA; CONDENSATION REACTIONS; FURAN RESINS; MOLECULAR WEIGHT; PYROLYSIS; SILICONES;

AMMONOLYSIS; ISOCYANATOSILIANE; MOLAR RATIOS; POLYSILOXAZANES; SILICON OXYNITRIDE; TETRAHYDROFURAN (THF);

SILICON NITRIDE;

EID: 33744822194     PISSN: 09145400     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj.114.492     Document Type: Review

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