A novel self-aligned substrate-diode structure for SOI technologies

Proceedings - IEEE International SOI Conference

Volumn 2005, Issue , 2005, Pages 169-170

  Pelella, Mario M ^a   Burbach, Gert ^b   Salman, Akram ^a   Beebe, Stephen ^a   Chan, Darin ^a   Buller, Jim ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744727316     PISSN: 1078621X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SOI.2005.1563576     Document Type: Conference Paper

References (4)

1. M.M. Pelella, "High performance SOI technology for Advanced Microprocessors," Proc. Of Int. Conf. On Solid State Devices and Materials, 2002, pp. 70-71.
2. D. Greenlaw, et al., "Taking SOI substrates and low-k dielectrics into high volume microprocessor production," IEDM 2003, pp 277-280.
3. A. Salman, M.M. Pelella, S. Beebe, and N. Subba, "BSD Protection for SOI Tech. using an Under-The-BOX (Substrate) Diode Structure," IEEE EOS/ESD Sym., Sept. 2004.
4. C. Putnam, et al., "An Investigation of ESD Protection Diode Options in SOI," IEEE SOI Conference Proc., Oct. 2005.