Influence of the sticking effect on the contact resistance of a MEMS DC-contact switch

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 540-545

  Huang, Jian Qiu ^a   Huang, Qing An ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744533272     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/089     Document Type: Article

References (6)

1. Lafontan X, Pressecq F, Preez G, Dufaza C and Karam J M 2001 Physical and reliability issues in MEMS micro-relays with gold contacts Proc. Int. Conf. Reliability, Testing, and Characterization of MEMS/MOEMS p 11-21
2. Majumder S, McGruer N E, Adams G G, Zavracky P M, Morrison R H and Krim J 2001 Study of contacts in an electrostatically actuated microswitch Sensors actuators A 93 19-26
3. Hyman D and Mehregany M 1999 Contact Physics of Gold Microcontacts for MEMS Switches IEEE Trans. Compon. Packag. Technol 22 357-364
4. Johnson K L 1992 Contact mechanics (Beijing: High Education Press)
5. Lichun C 1988 Theory and application of electric contact (Beijing: Mechanical Industry Press)
6. Wang Z, Wynblatt P 1998 Wetting and energetics of solid Au and Au-Ge/SiC interface Acta Material 46 4853-4859