Silicon microhotplate arrays as a platform for efficient gas sensing thin film research

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 203-208

  Dimeo Jr , F ^a   Semancik, S ^a   Cavicchi, R E ^a   Suehle, J S ^a   Tea, N H ^a   Vaudin, M D ^a   Kelliher, J T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RESISTANCE MEASUREMENT; FILM PREPARATION; GRAIN SIZE AND SHAPE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROMACHINING; MORPHOLOGY; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTOR DEVICE MANUFACTURE; STOICHIOMETRY; SURFACE PROPERTIES; THIN FILMS;

GAS SENSING THIN FILM RESEARCH; IN SITU CONDUCTANCE MEASUREMENT; SILICON MICROHOTPLATE ARRAYS; SILICON RESISTIVE HEATERS;

SEMICONDUCTING SILICON;

EID: 0030695689     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)