An improved chemical resistance and mechanical durability of hydrophobic FDTS coatings

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 454-457

  Kobrin, B ^a   Zhang, T ^a   Grimes, M T ^a   Chong, K ^a   Wanebo, M ^a   Chinn, J ^a   Nowak, R ^a  

^a Applied Microstructures Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744526341     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/074     Document Type: Article

References (4)

1. Geerken M, van Zanten T, Lammertink R, Borneman Z, Hijdam W, van Rijn C and Wesling M 2004 Chemical and Thermal Stability of Alkylsilane Based Coatings for Membrane Emulsification Advanced Eng. Materials 6 749-54
2. Parker E 2004 Micromechanical Systems (MEMS) Tribology in Microfluidic Environments Thesis (UC Berkeley)
3. Kobrin B, Ashurst W R, Maboudian R, Fuentes V, Nowak R, Yi R and Chinn J 2004 MVD Technique of Surface Modification AICHE Ann. Meeting (November Austin TX)
4. Kobrin B, Chinn J and Ashurst W R 2005 Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) NSTI Nanotech May 8-12 Anaheim CA