Sensitivity enhancement of polysilicon piezo-resistive pressure sensors with phosphorous diffused resistors

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 216-221

  Sivakumar, K ^a   Dasgupta, N ^a   Bhat, K N ^a   Natarajan, K ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b BHARAT ELECTRONICS LIMITED   (India)

Author keywords

Piezoresistive pressure sensor; Polysilicon; Silicon Fusion Bonding; SOI

Indexed keywords

EID: 33744515016     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/036     Document Type: Article

References (5)

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3. Schafer H, V Greeter and R Kobs 1989 Temperature-independent pressure sensors using polycrystalline silicon strain gauges Sensors Actuators A 17 521-527
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5. Kamins T 1998 Polycrystalline silicon for integrated circuits and displays 2nd edn (Kluwer academic publishers, USA)